説明
Film Thickness Measurement System構成
構成なしOEMモデルの説明
The Opti-Probe 3290 is a thin film measurement system that uses Beam Profile Reflectrometry (BPR) for thick dielectric films greater than 500A and Beam Profile Ellipsometry (BPE) for thin dielectric films less than 500A. It has a thermo electrically cooled diode laser with a wavelength of 675 nm and a tungsten halogen lamp for spectrometry mode with a range of 450 to 840 nm. The system can measure film thickness, index of refraction, extinction coefficient, and reflectivity for multiple layers and multiple parameters. It also provides automated defect review, enabling rapid correction of defects for improved quality.ドキュメント
ドキュメントなし
KLA / THERMA-WAVE
OP-3290
検証済み
カテゴリ
Thin Film / Film Thickness
最終検証： 12日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
98269
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / THERMA-WAVE
OP-3290
カテゴリ
Thin Film / Film Thickness
最終検証： 12日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
98269
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Film Thickness Measurement System構成
構成なしOEMモデルの説明
The Opti-Probe 3290 is a thin film measurement system that uses Beam Profile Reflectrometry (BPR) for thick dielectric films greater than 500A and Beam Profile Ellipsometry (BPE) for thin dielectric films less than 500A. It has a thermo electrically cooled diode laser with a wavelength of 675 nm and a tungsten halogen lamp for spectrometry mode with a range of 450 to 840 nm. The system can measure film thickness, index of refraction, extinction coefficient, and reflectivity for multiple layers and multiple parameters. It also provides automated defect review, enabling rapid correction of defects for improved quality.ドキュメント
ドキュメントなし