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説明
Thickness meter No missing parts Current Wafer size : 12構成
構成なしOEMモデルの説明
the ASET-F5, our third generation spectroscopic ellipsometer, which addresses the difficult film measurement needs that come from the continuing evolution of film development driven by shorter line widths. These new films demand an increasing capability to characterize and control them in production, a capability provided by the ASET-F5.ドキュメント
ドキュメントなし
KLA
ASET-F5
カテゴリ
Thin Film / Film Thickness
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
107076
ウェーハサイズ：
6"/150mm, 8"/200mm, 12"/300mm
ヴィンテージ：
不明
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説明
Thickness meter No missing parts Current Wafer size : 12構成
構成なしOEMモデルの説明
the ASET-F5, our third generation spectroscopic ellipsometer, which addresses the difficult film measurement needs that come from the continuing evolution of film development driven by shorter line widths. These new films demand an increasing capability to characterize and control them in production, a capability provided by the ASET-F5.ドキュメント
ドキュメントなし