説明
The tool has been kept under vacuum since it was pulled out of service. It has a cryo pump from 2016, and is a 2009 e-beam tool with 4 pockets. The software is live and active as well as the PLC for the tool. The tool also comes with a cryo compressor as well. The only part that is missing is the mechanical pump.構成
This tool was used mostly for metallization for lift off - Cr, Ti, and Au.OEMモデルの説明
提供なしドキュメント
ドキュメントなし
KURT J LESKER
PVD 75
検証済み
カテゴリ
Thin Film / Film Thickness
最終検証： 25日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
106800
ウェーハサイズ：
不明
ヴィンテージ：
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KURT J LESKER
PVD 75
カテゴリ
Thin Film / Film Thickness
最終検証： 25日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
106800
ウェーハサイズ：
不明
ヴィンテージ：
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
The tool has been kept under vacuum since it was pulled out of service. It has a cryo pump from 2016, and is a 2009 e-beam tool with 4 pockets. The software is live and active as well as the PLC for the tool. The tool also comes with a cryo compressor as well. The only part that is missing is the mechanical pump.構成
This tool was used mostly for metallization for lift off - Cr, Ti, and Au.OEMモデルの説明
提供なしドキュメント
ドキュメントなし