概要（Overview）

The Olympus AL120 is a semiconductor wafer handler with a microscope. It is designed to accommodate different wafer sizes, making it a key tool for expanding wafer fabrication facilities. The AL120 series consists of three models based on wafer diameter: the 200mm model, the 150mm and 200mm convertible model, and the 150mm model for wafer sizes of 150mm or less. Each system is designed for wafer transfer and microscope inspection, with topside and backside macro inspections available for all wafer sizes. The 360-degree self-rotating function provides a complete macro inspection of the wafer’s top and back surface, enabling easy identification of defects and particles