説明
説明なし構成
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEMモデルの説明
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.ドキュメント
ドキュメントなし
ASYST
SPARTAN
検証済み
カテゴリ
Wafer Handling
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
60881
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
ASYST
SPARTAN
カテゴリ
Wafer Handling
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
60881
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEMモデルの説明
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.ドキュメント
ドキュメントなし