JET
カテゴリ
Wafer Handling概要(Overview)
The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.
現在の掲載品
3
サービス
検査、保証、鑑定、ロジスティクス
The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.
3
検査、保証、鑑定、ロジスティクス