説明
Equipment Front End Module (EFEM) with two load ports. The EFEM is designed for manual, Automated Guided Vehicles (AGV), or Over Head Transport (OHT) loading of FOUPs or cassettes that contain wafers waiting to be processed in the process modules. The wafers are removed from FOUPs or casettes by the atmospheric robot in the EFEM aligned, and moved by the atmospheric robot to the Vacuum Back End Load Locks. Inside the EFEM is an enclosed area with an air flow to prevent particles from depositing on the wafer. Inside this area, referred to as the minienvironment, the atmospheric robot moves wafers from inside FOUPs and cassettes. The Vision Load Port Module attaches to the front openings or bays. The Razor™ Atmospheric Transfer Robot (ATR) moves the wafers between the Load Port Modules, Aligner, and Load Ports. The robot provides up to five axes of motion allowing off-center material pick and place and fast material swap. The end effectors available offer passive support, an active edge-grip, or a vacuum grip for high operating speeds.構成
Brooks Gemini II (included) -2 Vision load port modules, -Razor ATR Atmospheric Robot and Fusion Controller, -AlignerOEMモデルの説明
The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.ドキュメント
BROOKS AUTOMATION
JET
検証済み
カテゴリ
Wafer Handling
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
81687
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BROOKS AUTOMATION
JET
カテゴリ
Wafer Handling
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
81687
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available