説明

Wafersafe gantry stocker / sorter to replace cassette storage racks capacity of 600 wafers; approximate dimensions: 24" D x 124.5" L x 111.2" H chasis / cabinet_ _aluminum frame and location plates _white powder coated steel panels _white powder coated steel panels ( with windows ) for upper half _white powder coated steel bottom pan with adjustable vents _N2 plenum connected to standard filters at top of tool _hard-mounted N2 connection through tool _N2 connection at tool's facilities panel _automatic pressure regulator with plenum pressure sensor _LED lighting system for each wafer column _module locating and leveling hardware _6 columns of 100 wafer capacity at 10mm pitch for a total shelf capacity of 600 wafers -wafers supported by PEAK pins for minimum contact & surface area -shelf numbering system robotics_ _200mm edge grip end effector capable of handling Si wafers -vision guided end effector system for automatic slot verification -vision based column to gantry position QC check -automatic teaching _paddle QC system for end effector tolerance monitoring _Bosch XY gantry mounted from tool bottom with absolute encoders _dual Z1/Z2 linear motors for pick and place axis with absolute encoders _e chain clean cable management _200mm edge contact prealigner for notched wafers only _WID120 OCR for top and bottomside reads - qty 2 load stations_ _ergonomic tilting load ports for upward-facing cassette loading - qty 4 _carrier status and lot ID via display above load station _integrated carrier mapping system - qty 4 _hard mounted barcode reader inside load station for carrier ID computer / HMI_ _Intel I7 IPC system operating at ~3.6Ghz with 32GB RAM & 1TB HD _mirrored secondary hard drive _flush mount 27” touchscreen monitor _fold out keyboard & trackball _video monitoring system for rapid diagnosis and failure analysis transport / leveling / stability_ _adjustable floor mount stability feet and casters _pin lock retractable tilt protection legs for transport _floor mounting system _Microsoft windows 10 64bit LTSC IoT operating system (2032 EOL) _NADAtech system software with RBuilder GUI recipe tool _RBuilder extensions for wafer stocker _RBuilder extensions for typical carrier station wafer sorting _RBuilder extensions for GEM300 remote control jobfiles _RBuilder extensions for autoteach _RBuilder extensions for hardware to database synchronization _Jobfiles include “stock material” and “pull material” functions _stocker database includes but not limited to _storage location - column / shelf _acquired waferID _substrate ID _time on shelf GEM300 automation standards_ SEMI E4-0307 (SECS-I) SEMI E5-0220 (SECS-II) SEMI E30-0520 (GEM) SEMI E37-0819 (HSMS) SEMI E39-0703 (Obj Services) SEMI E40-1218 (Processing) SEMI E58-0703 (ARAMS) SEMI E87-0619 (CMS) emulated for open carriers SEMI E90-0312 (Substrate Tracking) SEMI E94-0314 (Control Job)