説明
Wafer Cleaning System with Nanospray CE safety marking certification.構成
Electric Supply: 3 Phase , 200 VAC , Full load 10.8 kVA 31.2 A, 50/60 Hz 3 wires + GND/PE SCCR 10 kA Main Breaker 60A Mass: 1660 KG Number of wafer loading ports: Qty 4 Wafer Loader type: 150 mm, open cassette Number of process modules: Qty 4 The modules do not have FFUs on top of them. 3 of the Process Modules are equipped with a Jet Nozzle and DI water 1 of the process modules is equipped with one Jet and one Nanospray nozzle and DI Water The modules do not have Brush arms The Jet Nozzle has qty 4 high pressure pumps installed. The Nanospray pressure is regulated by the house supply. Facilities connections: 1. Air 2. vacuum 3. N2 4. CO2 5. DI water 6. Cooling Water 7. NH4OH (Not currently used) 8. H2O2 (Not currently used) 9. Exhaust 10. Drain 11. Power SupplyOEMモデルの説明
Wafer size 100mm ~ 200mm Advanced Scrubber Featuring the Same Stability and Reliability as the Highly Regarded SS Series. SS-80EX Spin Scrubber is a Single Wafer Cleaning Equipment for 200 mm Semiconductor Wafers.ドキュメント
ドキュメントなし
カテゴリ
Wafer Scrubber
最終検証： 4日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
148408
ウェーハサイズ：
6"/150mm
ヴィンテージ：
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SCREEN / DNS / DAINIPPON SCREEN
SS-80EX
カテゴリ
Wafer Scrubber
最終検証： 4日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
148408
ウェーハサイズ：
6"/150mm
ヴィンテージ：
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Wafer Cleaning System with Nanospray CE safety marking certification.構成
Electric Supply: 3 Phase , 200 VAC , Full load 10.8 kVA 31.2 A, 50/60 Hz 3 wires + GND/PE SCCR 10 kA Main Breaker 60A Mass: 1660 KG Number of wafer loading ports: Qty 4 Wafer Loader type: 150 mm, open cassette Number of process modules: Qty 4 The modules do not have FFUs on top of them. 3 of the Process Modules are equipped with a Jet Nozzle and DI water 1 of the process modules is equipped with one Jet and one Nanospray nozzle and DI Water The modules do not have Brush arms The Jet Nozzle has qty 4 high pressure pumps installed. The Nanospray pressure is regulated by the house supply. Facilities connections: 1. Air 2. vacuum 3. N2 4. CO2 5. DI water 6. Cooling Water 7. NH4OH (Not currently used) 8. H2O2 (Not currently used) 9. Exhaust 10. Drain 11. Power SupplyOEMモデルの説明
Wafer size 100mm ~ 200mm Advanced Scrubber Featuring the Same Stability and Reliability as the Highly Regarded SS Series. SS-80EX Spin Scrubber is a Single Wafer Cleaning Equipment for 200 mm Semiconductor Wafers.ドキュメント
ドキュメントなし