説明
説明なし構成
AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEMモデルの説明
提供なしドキュメント
ドキュメントなし
AKRION
REARMOUNT
カテゴリ
Wet Benches - Auto
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
132894
ウェーハサイズ：
6"/150mm
ヴィンテージ：
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
AKRION Rearmount - Wetbench Application: polymer removal Process flow: EKC, IPA, DI Front- or rear-mount: rear Process Robot End-Effector: Controller: control zone main components pneumatic solenoid panel, heated tank control unit, digital I/O boards (OPTO22) Transfer robot: robot transfer arm, free standing unit Common I/O Station: separate Wafer transfer system: NA Dual buffer queues: PFA Cassettes: Quartz carriers Configuration of each wet process modules: Tank 1: Static tank EKC Tank 4 Recirc tank EKC Tank 2,3: IPA Tank 5 DI tank Vapor dryer with IPA Pumps: SECS: Yes Software: DOS Operating system: 386 computer/AkrionOEMモデルの説明
提供なしドキュメント
ドキュメントなし