説明
Single Wafer Processing構成
Vintage 2011, this system has already undergone extensive refurbishment Included: FFU RDM (installed but can be removed) Exhaust Up Ultrasonic Flowmeter 5 x Lauda Heat Exchanger (=max possible) Standard Handling 200mm N2 / DI included in Med Arm Standard Pin Chuck 200mm (NC type) Open Cassette Shutter Front and Rear Keyboard & Display 3xCDS Type “E” including RAID controller 400V AC Transformator if needed * Chuckdrive / Elevating unit bearings & motors & toothed belts * robot controller ESC200 * Brooks robot ATM407B * ECO Gripper moving parts * Lauda heat exchangers * Ionizer spikes * Chuck Pins * some CAN bus modules * Keyboard and KVM switch * partly chemical valves * SW backup Main Unit & CDS includedOEMモデルの説明
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.ドキュメント
ドキュメントなし
LAM RESEARCH / SEZ
SP203
検証済み
カテゴリ
Wet Etch
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
83131
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP203
検証済み
カテゴリ
Wet Etch
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
83131
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Single Wafer Processing構成
Vintage 2011, this system has already undergone extensive refurbishment Included: FFU RDM (installed but can be removed) Exhaust Up Ultrasonic Flowmeter 5 x Lauda Heat Exchanger (=max possible) Standard Handling 200mm N2 / DI included in Med Arm Standard Pin Chuck 200mm (NC type) Open Cassette Shutter Front and Rear Keyboard & Display 3xCDS Type “E” including RAID controller 400V AC Transformator if needed * Chuckdrive / Elevating unit bearings & motors & toothed belts * robot controller ESC200 * Brooks robot ATM407B * ECO Gripper moving parts * Lauda heat exchangers * Ionizer spikes * Chuck Pins * some CAN bus modules * Keyboard and KVM switch * partly chemical valves * SW backup Main Unit & CDS includedOEMモデルの説明
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.ドキュメント
ドキュメントなし