説明
GaN SEZ構成
構成なしOEMモデルの説明
The SEZ 4200 is a single wafer processing system that combines SEZ’s process capability with high throughput and reliability. It uses a dual arm robot to transport 200mm wafers from four cassettes to four process chambers, using one media for all chambers. The media can be recycled, heated, and filtered within the system or used in single pass mode. The system has an object-oriented software architecture with a Sematech compliant GUI and touch screen for easy operation. It has a cost-effective throughput/footprint ratio and competitive CoO. Options like Endpoint Detection System, ozone processing, and SMIF ensure application solutions that meet and exceed customer needs. Supported applications include polymer removal, metal pre-clean, and layer stripping.ドキュメント
ドキュメントなし
カテゴリ
Wet Etch
最終検証： 25日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
151455
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP4200
カテゴリ
Wet Etch
最終検証： 25日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
151455
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
GaN SEZ構成
構成なしOEMモデルの説明
The SEZ 4200 is a single wafer processing system that combines SEZ’s process capability with high throughput and reliability. It uses a dual arm robot to transport 200mm wafers from four cassettes to four process chambers, using one media for all chambers. The media can be recycled, heated, and filtered within the system or used in single pass mode. The system has an object-oriented software architecture with a Sematech compliant GUI and touch screen for easy operation. It has a cost-effective throughput/footprint ratio and competitive CoO. Options like Endpoint Detection System, ozone processing, and SMIF ensure application solutions that meet and exceed customer needs. Supported applications include polymer removal, metal pre-clean, and layer stripping.ドキュメント
ドキュメントなし