概要（Overview）

Wafer size 150mm ~ 200mm Inherits High-end Single Wafer Cleaning Technology to Deliver Outstanding Cost Performance. SU-2000 is a single-wafer cleaning system for ultra-thin substrate wafers. When the footprint of the SU-2000 (four-chamber specification) is compared with that of our existing two-chamber MP-2000, it is just 14 percent larger. This represents a major space saving and means the SU-2000 can be used to replace the MP-2000.