The XT:400E is an ultra-high-throughput, mainstream i-line scanner for 300-mm wafers. Delivering feature sizes down to 350nm, it is specifically aimed at fabrication of non-critical layers and, with this in mind, has been designed to lower the overall Cost-ofOwnership (CoO). 

ASML provides chipmakers with everything they need – hardware, software and services – to mass produce patterns on silicon through lithography.

ASML

TWINSCAN XT:1400E

ASML XT 1400 CONFIGURATION.pdf

TWINSCAN XT:1400E

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