説明
説明なし構成
KrFOEMモデルの説明
The FPA-5000ES3 is a KrF scanner with a 0.73 NA, designed for 130nm production. It is built on the Canon FPA-5000 scanning platform and incorporates experience from previous models. The ES3 has significant refinements, particularly in lens performance, and employs unique lens elements using Canon’s “wavefront engineering” method. Lens testing results show values much smaller than the manufacturing target, in some cases by as much as 30-40%.ドキュメント
ドキュメントなし
CANON
FPA-5000ES3
検証済み
カテゴリ
193 nm Step and Scan
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
75276
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2001
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Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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CANON
FPA-5000ES3
カテゴリ
193 nm Step and Scan
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
75276
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2001
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
KrFOEMモデルの説明
The FPA-5000ES3 is a KrF scanner with a 0.73 NA, designed for 130nm production. It is built on the Canon FPA-5000 scanning platform and incorporates experience from previous models. The ES3 has significant refinements, particularly in lens performance, and employs unique lens elements using Canon’s “wavefront engineering” method. Lens testing results show values much smaller than the manufacturing target, in some cases by as much as 30-40%.ドキュメント
ドキュメントなし