説明
Nikon NSR-S204B Wafer DUV Scanner構成
Laser Scanner Cymer: ELS-6400, Vintage:2001.08.09 KrF ScannerOEMモデルの説明
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.ドキュメント
ドキュメントなし
NIKON
NSR-S204B
検証済み
カテゴリ
248nm DUV
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Uncrated
製品ID：
93138
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
NIKON
NSR-S204B
検証済み
カテゴリ
248nm DUV
最終検証： 30日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Uncrated
製品ID：
93138
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Nikon NSR-S204B Wafer DUV Scanner構成
Laser Scanner Cymer: ELS-6400, Vintage:2001.08.09 KrF ScannerOEMモデルの説明
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.ドキュメント
ドキュメントなし