説明
3 reactors ASM Eagle XP8 Plasma Enhanced ALD Tool構成
XP8 Platform Front and rear Operations/Maintenance Touch Screen with pen Loader module transfer robot and controller with 3 load ports. 2 Load locks Wafer cooling chamber Four BOC Edwards dry pump (subject to availability) Exhausted gas box with 8 MFC capability per chamber 2 RF generators and controller per chamber Remote plasma cleaning (RPU) per chamber Two RF matchers per chamberOEMモデルの説明
Eagle XP8 is a high productivity 300mm tool for PEALD applications. The Eagle XP8 PEALD system can be configured with up to four Dual Chamber Modules (DCM), enabling eight chambers in high volume production within a very compact footprint.ドキュメント
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ASM
EAGLE XP8
カテゴリ
ALD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
101682
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available