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説明
ASHER構成
ASHEROEMモデルの説明
The GAMMA 2100 200mm photoresist removal system uses a plasma source to strip photoresist. The GAMMA architecture features a multi-station sequential processing design with six strip stations, resulting in high wafer throughput with a minimal number of critical subsystems.ドキュメント
ドキュメントなし
カテゴリ
Ashers / Plasma Cleaner
最終検証： 27日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
111882
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2002
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / NOVELLUS / GASONICS
GAMMA 2100
カテゴリ
Ashers / Plasma Cleaner
最終検証： 27日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
111882
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2002
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
ASHER構成
ASHEROEMモデルの説明
The GAMMA 2100 200mm photoresist removal system uses a plasma source to strip photoresist. The GAMMA architecture features a multi-station sequential processing design with six strip stations, resulting in high wafer throughput with a minimal number of critical subsystems.ドキュメント
ドキュメントなし