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TEL / TOKYO ELECTRON SYNAPSE V
  • TEL / TOKYO ELECTRON SYNAPSE V
  • TEL / TOKYO ELECTRON SYNAPSE V
説明
説明なし
構成
INSITU Bonder is applicable only to 8” wafers; it working principle is to bond two wafer with surface having metal compound, under high temperature and pressure -Incorporate with Formic acid for cleaning function after removal of oxide from wafer surface Performance: -High temperature bonding option → up to 450°C -Alignment accuracy → ± 3μm @ high temperature Typical Applications: -TSV – Si-Si
OEMモデルの説明
Synapse™ V is a 300mm wafer bonder/debonder system which enable temporary bonding or debonding process efficiently. As the continuation of Moore’s law is becoming more and more challenging, 3D-IC with through-silicon via (TSV) interconnects secure a firm position in the field of advanced semiconductor, attracting attention as a means to improve semiconductor performance. Synapse™ V is a temporary wafer bonding system, which allows two wafers to be bonded together by using various adhesives. The system consists of material coating, baking, and bonding functions to realize integrated wafer bonding processes in a single tool. Uniquely developed wafer alignment unit and wafer bonding module provide the highest level of Total Thickness Variation (TTV) and bonding accuracy. Temporary bonder system, capable of coating, baking and bonding in one tool.
ドキュメント

ドキュメントなし

カテゴリ
Bonder/Debonder

最終検証: 60日以上前

主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

102768


ウェーハサイズ:

8"/200mm


ヴィンテージ:

2016


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

TEL / TOKYO ELECTRON

SYNAPSE V

verified-listing-icon
検証済み
カテゴリ
Bonder/Debonder
最終検証: 60日以上前
listing-photo-6affcb853e034376bb605144d7256048-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/52349/6affcb853e034376bb605144d7256048/e3f2af66912942c88fdcafbae59ed0b7_250e10edd8fa49529ddbb5df839b32411201a_mw.jpeg
listing-photo-6affcb853e034376bb605144d7256048-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/52349/6affcb853e034376bb605144d7256048/3e0fac47d9014f8dbda694da975218ce_46b4fd3f21bb4d6989441c37b79822d81201a_mw.jpeg
主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

102768


ウェーハサイズ:

8"/200mm


ヴィンテージ:

2016


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし
構成
INSITU Bonder is applicable only to 8” wafers; it working principle is to bond two wafer with surface having metal compound, under high temperature and pressure -Incorporate with Formic acid for cleaning function after removal of oxide from wafer surface Performance: -High temperature bonding option → up to 450°C -Alignment accuracy → ± 3μm @ high temperature Typical Applications: -TSV – Si-Si
OEMモデルの説明
Synapse™ V is a 300mm wafer bonder/debonder system which enable temporary bonding or debonding process efficiently. As the continuation of Moore’s law is becoming more and more challenging, 3D-IC with through-silicon via (TSV) interconnects secure a firm position in the field of advanced semiconductor, attracting attention as a means to improve semiconductor performance. Synapse™ V is a temporary wafer bonding system, which allows two wafers to be bonded together by using various adhesives. The system consists of material coating, baking, and bonding functions to realize integrated wafer bonding processes in a single tool. Uniquely developed wafer alignment unit and wafer bonding module provide the highest level of Total Thickness Variation (TTV) and bonding accuracy. Temporary bonder system, capable of coating, baking and bonding in one tool.
ドキュメント

ドキュメントなし