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説明
Hitachi S-7840 CD-SEM 100mm cassette/ wafer configuration, tool is mechanically functional, but requires a new tip to be restored to full operation.構成
構成なしOEMモデルの説明
S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.ドキュメント
ドキュメントなし
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HITACHI
S-7840
カテゴリ
CD-SEM
最終検証： 15日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
124432
ウェーハサイズ：
4"/100mm
ヴィンテージ：
2000
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説明
Hitachi S-7840 CD-SEM 100mm cassette/ wafer configuration, tool is mechanically functional, but requires a new tip to be restored to full operation.構成
構成なしOEMモデルの説明
S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.ドキュメント
ドキュメントなし