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説明
説明なし構成
構成なしOEMモデルの説明
S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.ドキュメント
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HITACHI
S-7840
カテゴリ
CD-SEM
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
77496
ウェーハサイズ：
不明
ヴィンテージ：
不明
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説明
説明なし構成
構成なしOEMモデルの説明
S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.ドキュメント
ドキュメントなし