説明
Process Type: Metrology & Inspection構成
SW Version: 11 Options list: SECS Multipoint Measurement Hole Measurement Reduced Scan Image Database CP Controller Save to DOS FD IP Read Operator_AccessoriesOEMモデルの説明
S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.ドキュメント
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HITACHI
S-7840
カテゴリ
CD-SEM
最終検証： 20日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
149109
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Process Type: Metrology & Inspection構成
SW Version: 11 Options list: SECS Multipoint Measurement Hole Measurement Reduced Scan Image Database CP Controller Save to DOS FD IP Read Operator_AccessoriesOEMモデルの説明
S-7840 review SEM has been incorporated with (1) ADR (automatic defect review) and ADC (automatic defect classification), (2) data interface with various inspection equipment, (3) an interface which transfers review results with SEM images showing the defects to an advanced data analysis system, and (4) defect sampling function which allows selection of type of defects for reviewing.ドキュメント
ドキュメントなし