説明
-The tool is configured for 150 mm -Minor issue with an unstable high‑voltage module, but it can be repaired by the OEM構成
構成なしOEMモデルの説明
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.ドキュメント
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HITACHI
S-9260A
カテゴリ
CD-SEM
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
142218
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
-The tool is configured for 150 mm -Minor issue with an unstable high‑voltage module, but it can be repaired by the OEM構成
構成なしOEMモデルの説明
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.ドキュメント
ドキュメントなし