S-9300
カテゴリ
CD-SEM概要（Overview）
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.
現在の掲載品
5
サービス
検査、保証、鑑定、ロジスティクス
