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説明
説明なし構成
構成なしOEMモデルの説明
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.ドキュメント
ドキュメントなし
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HITACHI
S-9300
カテゴリ
CD-SEM
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
114178
ウェーハサイズ：
不明
ヴィンテージ：
不明
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説明
説明なし構成
構成なしOEMモデルの説明
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.ドキュメント
ドキュメントなし