説明
Automated Wafer Coater / Developer System構成
- Supplies three different resists and two developers - Can load up to 25 wafers for batch coating and developing process - Has spray-coating capabilities - Automatic resist dispensing - Controllable topside and bottom side Edge bead removal - 4 hotplates and two chill plates for Soft and/or Hard baking - A robot can load the wafers in to any of the coat, bake, chill and develop stations Materials provided in EVG 150 include: - 3 resists (SPRTM 700-1.0, SPRTM 220-3.0 and AZ4620) - 2 developers (AZ300-MIF and CD-26) Not working due to a computer issueOEMモデルの説明
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameterドキュメント
ドキュメントなし
EVGroup (EVG)
EVG150
検証済み
カテゴリ
Coaters & Developers
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
65000
ウェーハサイズ：
4"/100mm, 6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
EVGroup (EVG)
EVG150
カテゴリ
Coaters & Developers
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
65000
ウェーハサイズ：
4"/100mm, 6"/150mm
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Automated Wafer Coater / Developer System構成
- Supplies three different resists and two developers - Can load up to 25 wafers for batch coating and developing process - Has spray-coating capabilities - Automatic resist dispensing - Controllable topside and bottom side Edge bead removal - 4 hotplates and two chill plates for Soft and/or Hard baking - A robot can load the wafers in to any of the coat, bake, chill and develop stations Materials provided in EVG 150 include: - 3 resists (SPRTM 700-1.0, SPRTM 220-3.0 and AZ4620) - 2 developers (AZ300-MIF and CD-26) Not working due to a computer issueOEMモデルの説明
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameterドキュメント
ドキュメントなし