説明

TEL ACT8 + NIKON I14 ILINE TRACK + ILINE STEPPER TEL ACT 8 COATER/ DEVELOPER (2C2D) System Type Description Quantity Main System MAIN BODY 1 Handler System ROBOT 1 Factory Interface SMIF 4 Others Handler System IRA 1 Options System Main System Handler System CRA 1 Excluded Items List (Pumps, Chillers & Abatement are all excluded NIKON I14 System Type Description Quantity Handler System Wafer Loader Type 3 1 Options System Others Main System Control Rack 1 Main System NSR Main Body 1 Factory Interface SMIF 2 Main System Temperature Control Rack 1 Description Quantity Temperature Controller Rack cover missing 1 Control Rack side cover missing 1

構成

2C2D

OEMモデルの説明

CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.