説明

TEL ACT8 + NIKON I14 ILINE TRACK + ILINE STEPPER TEL ACT8 Hardware Configuration System Type Description Quantity Main System MAIN BODY 1 Options System Handler System ROBOT 1 Handler System CRA 1 Factory Interface SMIF 4 Handler System IRA 1 Others Excluded Items List (Pumps, Chillers & Abatement are all excluded) NIKON I14 Hardware Configuration System Type Description Quantity Main System Control Rack 1 Handler System Wafer Loader Type 3 1 Factory Interface SMIF 2 Options System None Others None Main System Temperature Control Rack 1 Main System NSR Main Body 1 Description Quantity Temperature Controller Rack cover missing 1 Control Rack side cover missing 1

構成

2C2D

OEMモデルの説明

CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.