説明

Asset Description TCDEV-36 TEL ACT 8 COATER/ DEVELOPER Software Version 1.18.003 CIM SECS Process COAT/DEVELOP Excluded Items List (Pumps, Chillers & Abatement are all excluded)

構成

System Type Description Quantity Status Handler System PRA 2 OK Handler System IRA 1 OK Factory Interface SMIF 3 OK Main System MAIN BODY 1 OK Handler System CRA 1 OK

OEMモデルの説明

CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.