説明
説明なし構成
Type: CVD SYSTEM, 3 CHAMBER WSi Process Condition: excellent System was running production until shut down Turned of: Nov 2007 De-installed: Dec 2007 Maintenance by : TEL secs/gem: yes CE Mark: yes SW Version UI V4.8HL Main Frame MBB730 (3 chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack CVD SYSTEM, 3 CHAMBER WSi Process Gases: N2 (ox) 4 l/min N2 (red) 125 l/min Ar 1500 sccm WF6 15 sccm ClF3 1500 sccm DCS 1500 sccmOEMモデルの説明
提供なしドキュメント
ドキュメントなし
TEL / TOKYO ELECTRON
MB2 730HT
検証済み
カテゴリ
CVD (Metalization)
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
28938
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1996
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示TEL / TOKYO ELECTRON
MB2 730HT
検証済み
カテゴリ
CVD (Metalization)
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
28938
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1996
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Type: CVD SYSTEM, 3 CHAMBER WSi Process Condition: excellent System was running production until shut down Turned of: Nov 2007 De-installed: Dec 2007 Maintenance by : TEL secs/gem: yes CE Mark: yes SW Version UI V4.8HL Main Frame MBB730 (3 chambers) Maintenance Table UI-Rack Additional breaker box MBB-730 Main Power Distribution Power Rack CVD SYSTEM, 3 CHAMBER WSi Process Gases: N2 (ox) 4 l/min N2 (red) 125 l/min Ar 1500 sccm WF6 15 sccm ClF3 1500 sccm DCS 1500 sccmOEMモデルの説明
提供なしドキュメント
ドキュメントなし