説明

Producer Split 3 Chamber

構成

Spec Selected Option System Information MAINFRAME PRODUCER SPLIT PROJECT NO Wafer Specification Wafer Size 200mm Wafer Shape JMF Chamber Type / Location Position A PECVD SILANE TWIN Position B PECVD SILANE TWIN Position C PECVD SILANE TWIN Position A Process DARC W/GG NITRIDE / SILANE USG Position B Process DARC W/GG NITRIDE / SILANE USG Position C Process DARC W/GG NITRIDE / SILANE USG Electrical Requirements Line Voltage 200/208 VAC Line Frequency 60 Hz System Safety Equipment CE Mark YES System Labels ENGLISH WITH KOREAN HANGUL LABELS (A / B / C) - PECVD SILANE TWIN PE SILANE Chamber Components Ceramic Heater Ass'y PKIT Frequency Type SINGLE (HF ONLY) Manometer DUAL (10/100 TORR) Clean Method REMOTE CLEAN RPS (2L) Endpoint Detector NONE RF GENERATOR 1 RFG-2000-2V DPA NONE Leak Check Port YES CHAMBER O-RINGS CHEMRAZ SC512 or Equivalent Gas Delivery Options Gas Panel Single Line Drop YES Gas Feed BOTTOM System Cabinet Exhaust TOP MFCs Valves FUJIKIN 5 RA MAX Filters PALL SST 5 RA MAX Regulators VERIFLO 10 RA Transducer MKS 5 RA WITHOUT DISPLAY (A / B / C) - PE SILANE Twin Pallet Gas Pallet DARC W/GG NITRIDE / SILANE USG L 1 N2O - 500 SCCM L 2 N2O - 5.0 SLM L 3 EMPTY Line 1 HE - 5.0 SLM Line 2 N2 PURGE Line 3 NH3 - 500 SCCM Line 4 N2 - 10.0 SLM Line 5 SIH4 - 300 SCCM Line 6 SIH4 - 1.0 SLM Line 7 EMPTY Line 8 N2 PURGE Line 9 AR - 5.0 SLM Line 10 NF3 - 3.0SLM Liquid Source TEOS CABINET N/A Interlock Kit Type Mainframe Options General Mainframe System Placement THROUGH-THE-WALL Transfer Chamber RGA Port NW25 Slit Valve SLIT VALVE W/ G74P System Controller FACILITIES UPS INTERFACE REMOTE AC PANEL NO Transfer Chamber Robot Blade METAL Factory Interface Options Factory Interface System (200MM) Front End Interface MANAUAL 2 CASSETTE SIGNAL LAMP Signal Lamp Tower Location FRONT MOUNTED Signal Lamp Tower Lamp Colors RED-A-G-B Remote Options Heat Exchanger/Chiller System Heat Exchanger Heat Exchanger Quantity System Monitors 1ST Local Monitor 2ND Local Monitor Umbilicals HX and Chiller Umbilicals First Local Monitor Cable Second Local Monitor Cable Pump Cables Pumps Pump Provider Loadlock Pump Process Chamber Pump Ch A Process Chamber Pump Ch B Process Chamber Pump Ch C