LAM RESEARCH / NOVELLUS CONCEPT TWO "C2"

説明

1 Mainframe w/ 3 Chambers Damages/Deficites: Chamber Turbo Pumps & HF/LF Generators EOL: Turbo Pumps

構成

Novellus Concept Two SPEED

OEMモデルの説明

The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.