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SEMVISION G3 LITE

カテゴリ
Defect Inspection
概要(Overview)

The SEMVision G3 Lite is a part of Applied Materials’ SEMVision G3 family, which is the industry’s fastest and most sensitive line of defect review and analysis tools for 65/45nm manufacturing and beyond. The new line of three systems sets the industry benchmark with 30nm sensitivity and throughputs of up to 1,800 defects per hour.

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