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eDR-5200

カテゴリ
Defect Inspection
概要(Overview)

The eDR-5200 features a lens system that delivers a significant improvement in resolution, meeting production and process development requirements for advanced design-rule semiconductor devices. Unique connectivity technology between the eDR-5200 and our market-leading inspection systems provides additional benefits to our customers with respect to defect redetection, classification and speed.

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