The eS805 Series electron-beam wafer defect inspection systems capture physical and electrical defects on a broad range of materials, layers and structures and feature a new image computer, new auto-focus subsystem and higher beam current densities.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

eS805

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