説明

Wafer surface particle detection machine

構成

構成なし

OEMモデルの説明

Surfscan 7700 is an in-line equipment that monitors contamination on all types of devices with an optimal sensitivity of 0.15 micron. It can detect contaminants below 0.20 micron on complex process levels and multiple systems can be correlated using the same inspection recipes. It also has a microscope review option for on-line classification of contaminants.