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2138
概要（Overview）
The KLA-2138 is an inline wafer inspection system that uses ultra-broadband technology to detect a wide range of yield-relevant defects on all process layers at high speeds. It features improved brightfield optics, Segmented Auto Threshold technology, and an ultra-broadband illumination source for increased sensitivity and faster setup times. An integrated SMIF minienvironment is also available to streamline automation and reduce fab cleanliness requirements.
現在の掲載品
10
サービス
検査、保証、鑑定、ロジスティクス
