説明
Metrology / inspection system構成
Stage Handler Main Body (Qty 2) SMIF Factory Interface Process: DFEC Software Version: KLA2138 CIM: SECOEMモデルの説明
The KLA-2138 is an inline wafer inspection system that uses ultra-broadband technology to detect a wide range of yield-relevant defects on all process layers at high speeds. It features improved brightfield optics, Segmented Auto Threshold technology, and an ultra-broadband illumination source for increased sensitivity and faster setup times. An integrated SMIF minienvironment is also available to streamline automation and reduce fab cleanliness requirements.ドキュメント
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KLA
2138
カテゴリ
Defect Inspection
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
137875
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available