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説明
KLA2367 Lamp構成
11471781OEMモデルの説明
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.ドキュメント
ドキュメントなし
KLA
2367
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
101298
ウェーハサイズ：
8"/200mm, 12"/300mm
ヴィンテージ：
不明
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説明
KLA2367 Lamp構成
11471781OEMモデルの説明
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.ドキュメント
ドキュメントなし