説明
Main System - Inspection Unit Handler System - Robot Options System - None Factory Interface - FOUP Others - Pillar構成
Software Version - 6.3.24.3 CIM - SECS/GEM Process -Darkfield InspectionOEMモデルの説明
The AIT XUV is KLA-Tencor’s next-generation double-darkfield optical inspection tool. It offers higher throughput and sensitivity for 65-nm production requirements, with a wide range of spot sizes and advanced detection algorithms. It also features an auto-positioning system, autofocus unit, and iADC capability for faster results. It is field upgradeable from the AIT UV platform and provides detection capability for current-layer defects at speeds up to three times faster than the prior-generation AIT XP system, with improved focus, tracking performance, and die-to-die registration.ドキュメント
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同様のリスト
すべて表示
KLA
AIT XUV
カテゴリ
Defect Inspection
最終検証： 8日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
146762
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Main System - Inspection Unit Handler System - Robot Options System - None Factory Interface - FOUP Others - Pillar構成
Software Version - 6.3.24.3 CIM - SECS/GEM Process -Darkfield InspectionOEMモデルの説明
The AIT XUV is KLA-Tencor’s next-generation double-darkfield optical inspection tool. It offers higher throughput and sensitivity for 65-nm production requirements, with a wide range of spot sizes and advanced detection algorithms. It also features an auto-positioning system, autofocus unit, and iADC capability for faster results. It is field upgradeable from the AIT UV platform and provides detection capability for current-layer defects at speeds up to three times faster than the prior-generation AIT XP system, with improved focus, tracking performance, and die-to-die registration.ドキュメント
ドキュメントなし