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市場 > Defect Inspection > KLA > CANDELA CS920

CANDELA CS920

カテゴリ
Defect Inspection
概要(Overview)

The Candela CS920 is the first integrated surface and photoluminescence defect detection system for Silicon Carbide wafers. It has a UV laser for high sensitivity to defects and can detect and classify SiC epitaxy layer surface defects and crystal defects. These features help improve epitaxy yield.

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