説明
Metrology / inspection system構成
Known issues: Not included: KVM; SAC Board FOUP Factory Interface Inspection Unit Robot Handler Chiller Process: Darkfield Inspection Software Version: 9.5.410.2.7 CIM: SECS/GEMOEMモデルの説明
The Puma 9000 is a modular and extendible dark field defect inspection system that uses KLA-Tencor’s Streak imaging technology to capture critical defects at production throughputs. It combines advanced UV illumination optics with high-speed imaging and a solid-state linear sensor to produce stable and repeatable measurements. Its enhanced sensitivity over existing inspection systems allows for cost-optimized inspection strategies and tighter production control.ドキュメント
ドキュメントなし
KLA
PUMA 9000
カテゴリ
Defect Inspection
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
154807
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Metrology / inspection system構成
Known issues: Not included: KVM; SAC Board FOUP Factory Interface Inspection Unit Robot Handler Chiller Process: Darkfield Inspection Software Version: 9.5.410.2.7 CIM: SECS/GEMOEMモデルの説明
The Puma 9000 is a modular and extendible dark field defect inspection system that uses KLA-Tencor’s Streak imaging technology to capture critical defects at production throughputs. It combines advanced UV illumination optics with high-speed imaging and a solid-state linear sensor to produce stable and repeatable measurements. Its enhanced sensitivity over existing inspection systems allows for cost-optimized inspection strategies and tighter production control.ドキュメント
ドキュメントなし