KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

The Surfscan® SP3 is an unpatterned wafer inspection tool available in 450mm, 300mm, and 300mm/450mm bridge tool configurations. It uses deep ultra-violet (DUV) sensitivity and has a throughput up to three times that of its predecessor. It can detect critical defects and surface quality issues for IC, OEM, and substrate manufacturing at the 2Xnm design node. The tool also includes an integrated SURFmonitor module that characterizes and measures surface quality. It has flexible configurations and a reliable, extendible architecture. It is used for qualification and monitoring of process tools for the 2Xnm design node within the IC fab, as well as serving as a lithography process tool monitor. The Surfscan SP3 can also be used for incoming wafer qualification, inline process control, final wafer qualification, process tool qualification, and as a process uniformity monitor.

SURFSCAN SP3

24.png

4.png

1.png

25.png

21.png

3.png

26.png

32.png

30.png

31.png

28.png

27.png

22.png

18.png

19.png

17.png

16.png

13.png

29.png

14.png

7.png

15.png

8.png

9.png

12.png

6.png

11.png

5.png

10.png

2.png

23.png

20.png

35.png

34.png

33.png

KLA

SURFSCAN SP3

Defect Inspection

同様のリスト

KLA

SURFSCAN SP3

KLA

SURFSCAN SP3

KLA

SURFSCAN SP3

SURFSCAN SP3

Defect Inspection

同様のリスト

KLA

SURFSCAN SP3

KLA

SURFSCAN SP3

KLA

SURFSCAN SP3