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説明
HDD not included • Un-patterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination. Deep Ultraviolet (DUV) source • DUV-specific apertures to enable defect capture on un-patterned thin films • High speed stage and advanced imaging computer for enhanced productivity • Full-wafer high-resolution haze maps構成
Integrated Console Bare Wafer Inspection Station Equipment Front End Module (EFEM) 3 Port Wafer Loading UnitOEMモデルの説明
The Surfscan® SP3 is an unpatterned wafer inspection tool available in 450mm, 300mm, and 300mm/450mm bridge tool configurations. It uses deep ultra-violet (DUV) sensitivity and has a throughput up to three times that of its predecessor. It can detect critical defects and surface quality issues for IC, OEM, and substrate manufacturing at the 2Xnm design node. The tool also includes an integrated SURFmonitor module that characterizes and measures surface quality. It has flexible configurations and a reliable, extendible architecture. It is used for qualification and monitoring of process tools for the 2Xnm design node within the IC fab, as well as serving as a lithography process tool monitor. The Surfscan SP3 can also be used for incoming wafer qualification, inline process control, final wafer qualification, process tool qualification, and as a process uniformity monitor.ドキュメント
ドキュメントなし
PREFERRED
SELLER
検証済み
カテゴリ
Defect Inspection
最終検証： 30日以上前
Buyer pays 12% premium of final sale price
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105386
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2017
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PREFERRED
SELLER
KLA
SURFSCAN SP3
カテゴリ
Defect Inspection
最終検証： 30日以上前
Buyer pays 12% premium of final sale price
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105386
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2017
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
HDD not included • Un-patterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination. Deep Ultraviolet (DUV) source • DUV-specific apertures to enable defect capture on un-patterned thin films • High speed stage and advanced imaging computer for enhanced productivity • Full-wafer high-resolution haze maps構成
Integrated Console Bare Wafer Inspection Station Equipment Front End Module (EFEM) 3 Port Wafer Loading UnitOEMモデルの説明
The Surfscan® SP3 is an unpatterned wafer inspection tool available in 450mm, 300mm, and 300mm/450mm bridge tool configurations. It uses deep ultra-violet (DUV) sensitivity and has a throughput up to three times that of its predecessor. It can detect critical defects and surface quality issues for IC, OEM, and substrate manufacturing at the 2Xnm design node. The tool also includes an integrated SURFmonitor module that characterizes and measures surface quality. It has flexible configurations and a reliable, extendible architecture. It is used for qualification and monitoring of process tools for the 2Xnm design node within the IC fab, as well as serving as a lithography process tool monitor. The Surfscan SP3 can also be used for incoming wafer qualification, inline process control, final wafer qualification, process tool qualification, and as a process uniformity monitor.ドキュメント
ドキュメントなし