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説明
KLA Advanced Macro Inspection Module構成
Macro InspectionOEMモデルの説明
2900 and 2905: Optical broadband plasma wafer defect inspectors that provide capture of yield-relevant defects on 2Xnm memory and logic devices.ドキュメント
ドキュメントなし
KLA
2900
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
91270
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2011
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説明
KLA Advanced Macro Inspection Module構成
Macro InspectionOEMモデルの説明
2900 and 2905: Optical broadband plasma wafer defect inspectors that provide capture of yield-relevant defects on 2Xnm memory and logic devices.ドキュメント
ドキュメントなし