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市場 > Defect Inspection > KLA > SURFSCAN 6200

SURFSCAN 6200

カテゴリ
Defect Inspection
概要(Overview)

The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.

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