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説明
KLA-Tencor Surfscan 6200 particle counter . Installed in Clean-room..構成
Working - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down accessories. - Tencor approved blower assembly. - 30mW New Ar-Laser - 208V/60HZ, 17A. - MS-DOS 6.22 ,Windows 3.1. - Software version: 2.1.OEMモデルの説明
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.ドキュメント
ドキュメントなし
検証済み
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
65986
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1994
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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すべて表示
KLA
SURFSCAN 6200
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
65986
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1994
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
KLA-Tencor Surfscan 6200 particle counter . Installed in Clean-room..構成
Working - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down accessories. - Tencor approved blower assembly. - 30mW New Ar-Laser - 208V/60HZ, 17A. - MS-DOS 6.22 ,Windows 3.1. - Software version: 2.1.OEMモデルの説明
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.ドキュメント
ドキュメントなし