説明

Asset Description TF0045 Software Version E3.240 CIM SECS Process PASSIVATION System Type Description Quantity Handler System LL & Buffer 1 Options System process chamber 4 Main System Mainframe 1 Factory Interface NONE Others SYSTEM CONTROLLER 1 Description Quantity MFA 2 DRY PUMP 6 Description Quantity 2K2VGEN 2 HDD 2 DPA Gen 3 SBC BD 1 Excluded Items List (Pumps, Chillers & Abatement are all excluded)

構成

構成なし

OEMモデルの説明

The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.