APPLIED MATERIALS (AMAT) CENTURA METAL DPS

説明

説明なし

構成

Centura I DPS METEL Rev.0 2-ETCH / 2-ASP 6 inch

OEMモデルの説明

Two new etch systems were launched in 1996 for HDP etching of metal and silicon films, using AMAT's DPS (Decoupled Plasma Source) technology. The DPS Metal Etch Centura and DPS Silicon Etch Centura are aimed at very advanced applications, primarily for deep submicron devices (0.25-micron).