説明
The 2019 Hitachi High-Technologies Dry Etch / Plasma Asher is engineered for precision processing, optimizing etching and ashing capabilities in semiconductor applications. Its advanced technology ensures uniformity and high throughput, making it ideal for both production and research settings. This equipment is designed to meet stringent industry standards, providing reliability and enhanced performance in the manufacturing process. The構成
Retronix Semiconductor is pleased to present a 2019 Hitachi High-Technologies HS 9050 Dry Etch / Plasma Asher, configured for high-current operation (150A, 3Ø AC 208V). This 12” multi-chamber platform comprises: Five Asher / Etch chambers Two Cooling chambers Integrated transfer modules Mini-Environment Wafer Loading Module (EFEM) The system is configured for copper processing. HDD has been removed and no software is included. This is a modern, high-performance platform suited to facilities seeking reliable dry etch capability without extended OEM lead times.OEMモデルの説明
HS-9050 is equipped with a gas system compatible with both organic and inorganic films. Processing can be flexibly set based on the structure of the film layers, enabling the entire removal process of multilayer resists in next-generation devices to be performed within the same chamber. Meanwhile, helical downflow plasma has been newly adopted as the plasma source, resulting in a highly efficient, less damaging process.ドキュメント
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HITACHI
HS-9050
カテゴリ
Dry / Plasma Etch
最終検証： 今日
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Palletized
製品ID：
143434
ウェーハサイズ：
不明
ヴィンテージ：
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available